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High Temp Vertical Process Carrier, 200mm |
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The
FALCON is a vertical process cassette used to transport 25 wafers
through front end fab processes requiring higher temperatures, chemical
resistance, static protection, low particulate generation and ultra-low
outgassing. The FALCON process cassette is injection molded from
a semiconductor grade high temperature resin with ESD properties
in the E5 - E9 range.
Product Features
• Compatible with automated material handling systems
• High temperature resin
• Chemically resistant
• Low particulate generation
• Ultra low outgassing
• Dimensionally stable
• Static dissipative
• Ultra high temp resin option available
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